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HHG Extreme Ultraviolet (EUV) Light Sources Lasers Semiconductor Inspection

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Extreme Ultraviolet (EUV) Imaging Spectrometer

EUV Imaging Spectrometer: Equipped with a front-end EUV spectrometer for selecting specific EUV wavelengths, featuring a large vacuum chamber housing multiple motorized vacuum mirror mounts and a multi-axis sample stage with adjustable degrees of freedom. It also incorporates a wide-spectral-response EUV camera with selectable target surfaces, catering to mono-/multi-chromatic imaging and spectroscopy needs from visible to EUV light.

EUV Monochromator and Beamlines

The EUV monochromator enables the isolation of single harmonics from the comb-like spectrum generated by high harmonic generation, employing versatile optical reflection modules to spatially split monochromatic and polychromatic beamlines. This setup satisfies diverse wavelength separation and filtering requirements, enabling independent experimentation with both monochromatic and polychromatic beams.

EUV Generators (HHG Components)

Highly compact HHG units with automatic laser locking and coupling capabilities, designed for compatibility with various gases adjustable to pressures between 0-1 atm. Marked improvements in stability and reproducibility are achieved, alongside simplified gas mixing and switching operations with supreme reliability.

EUV Beam Splitter

The EUV beam splitter boasts a high reflectivity for extreme ultraviolet light (>70%) while maintaining a high transmission rate for infrared light (>65%). Its primary function is to filter out the majority of the high-energy, fundamental frequency, femtosecond infrared light from the emitted beam. Composed of dual electric motor modules and an EUV camera feedback unit, it leverages an in-house developed algorithm for EUV beam pointing stabilization, thereby enabling the stable pointing and locking of the EUV beam.

Integrated EUV Light Source & Imaging Spectrometer

Incorporates a driver for femtosecond lasers, HHG components, EUV beam splitter, monochromator, spectrometer, and both EUV imager and interference lithography capabilities. Facilitates the full range of applications from high harmonic generation to monochromatic harmonic imaging or interferometric lithography.

Integrated EUV Light Source & Spectrometer

Includes a femtosecond laser driver, HHG components, beam splitter, monochromator, and spectrometer. Enables the selection of mono-/multi-chromatic harmonics post-generation, outputting femtosecond/attosecond pulses at specified wavelengths, compatible with angle-resolved photoelectron spectroscopy, atomic/molecular spectroscopy, and crossed molecular beam experiments.

EUV Absolute Power Meter

Utilizes calibrated EUV photodiode to measure the absolute power of incoming beamlines, suitable for harmonic power measurements before and after filtering. Capable of measuring absolute power for both single and multiple wavelengths, it also facilitates precise determinations of transmittance and reflectance.

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